Phase transformation and impurity redistribution during pulsed laser irradiation of amorphous silicon layers
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 1984
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.334192